| 摘要 |
<p>An optical pellicle and package are disclosed. The optical pellicle includes a pellicle membrane and a pellicle frame with a cover side, a membrane side and an outer edge. The pellicle membrane is mounted and covers a substantial portion of the membrane side of the pellicle frame. The membrane side of the pellicle frame inc ludes a peripheral region that extends beyond the pellicle membrane. In one embodiment of the invention, the peripheral region includes a relieved portion at the periphery of the membrane side of the pellicle frame. Another embodiment includes one of the pre viously described optical pellicles and a package. The package includes a first piece an d a second piece. The first piece includes a structure for supporting an optical pe llicle. The structure is configured to support the optical pellicle so that the pellicle mem brane is free from contact with the first piece of the package. The second piece of the packag e is configured to mate with the first piece, thereby enclosing the optical pellicle within the package. When enclosed within the package, the pellicle is free from contact with the first and second pieces of the package. Finally, a method for assemblin g such a packaged pellicle is also disclosed.</p> |
