| 摘要 |
PURPOSE:To prevent dust from being stuck to front and rear faces of a reticle, by providing an air supply mechanism equipped with a filter in a reticle set part of a projection exposure machine and using the machine while supplying an air current to front and rear faces of the reticle from plural nozzles of this supply mechanism. CONSTITUTION:After air pressurized by a compressor has dust eliminated by a filter 10, air is divided upward and downward while interposing a reticle 1 and is supplied to T-shaped air supply tubes 12 provided with plural nozzles 11 and is blown out. Nozzles 11 provided in two air supply tubes 12 are inclined to form an air film around the reticle 1. Clean air is sent continuously from the air supply mechanism to coat always front and rear faces of the reticle with a weak air current after the reticle 1 is set to the projection exposure machine in this manner, thereby preventing sticking of dust. |
