发明名称 Herstellungsverfahren für Dünnschicht-Supraleiter
摘要 Bi-Ti-O or Bi-W-O thin film of stable crystal phase is manufactured by forming a Bi-Ti-O of Bi-W-O thin film periodically in an environment including activated oxygen. A layered structure of Bi-Sr-Ca-Cu-O thin films and Bi-Ti-O or Bi-W-O thin films is manufactured by forming a Bi-Ti-O of Bi-W-O thin film periodically in an environment including activated oxygen. A stable superconductor thin film of high superconducting transition temperature is manufactured reproducibly by layering alternately a layered oxide superconductor thin film of Tl-Ba-Ca-Cu-O system and a Bi-W-O insulator thin film. <IMAGE>
申请公布号 DE69224214(T2) 申请公布日期 1998.04.30
申请号 DE1992624214T 申请日期 1992.06.02
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., KADOMA, OSAKA, JP 发明人 ICHIKAWA, YO, MORIGUCHI-SHI, OSAKA 570, JP;SETSUNE, KENTARO, SAKAI-SHI, OSAKA 590-01, JP;ADACHI, HIDEAKI, NEYAGAWA-SHI, OSAKA 572, JP
分类号 C23C14/00;C23C14/08;C30B23/02;H01L39/12;H01L39/24 主分类号 C23C14/00
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