发明名称 Method for making an optical pellicle
摘要 The method of preparing an optical pellicle having a pellicle membrane and a pellicle frame comprises dispensing a quantity of adhesive onto the pellicle membrane in a pattern corresponding to the shape of the pellicle frame. It also involves positioning the pellicle membrane and the pellicle frame relative to each other such that the adhesive and the frame are aligned and mounting the pellicle membrane onto the pellicle frame by bringing the adhesive-covered portion of the pellicle membrane into contact with the pellicle frame. The dispensing step includes applying the adhesive with an adhesive dispenser having a dispenser tip with a flexible distal portion. The dispensing step includes applying the adhesive with an adhesive dispenser having a dispenser tip with a rigid distal portion.
申请公布号 EP0759576(A3) 申请公布日期 1998.04.29
申请号 EP19960305026 申请日期 1996.07.08
申请人 MICRO LITHOGRAPHY, INC. 发明人 BIH, QOANG RUNG
分类号 G03F1/64;H01L21/027 主分类号 G03F1/64
代理机构 代理人
主权项
地址