| 摘要 |
<p>An ink jet recording head includes: a piezoelectric body element 20 that is formed on a silicon substrate 10; an ink cavity 15 that is formed at a location of the silicon substrate 10; corresponding to the piezoelectric body element 20; and a jetting port 18 for jetting ink contained in the ink cavity 15. The ink cavity 15 has a beamlike ion implanted layer 19 that is not only interposed between at least a pair of confronting side walls 15a, 15b thereof while coming in contact with desired regions of such side walls 15a, 15b, but also formed so as to be distanced from other side walls 15c, 15d thereof. <IMAGE></p> |
