Probe card with needle-like probes resiliently supported by rigid substrate and process for fabricating thereof

摘要

A probe card is used in a testing apparatus for connecting the testing apparatus to electrodes of an integrated circuit device, and has needle-like conductive probes (27) provided on a resilient layer (21c) supported by a ceramic substrate (21b) in a cantilever fashion so that the needle-like conductive probes absorbs the irregularity of the electrodes. <IMAGE>