发明名称 Electron emissive film and method
摘要 <p>A method for forming an electron emissive film (200, 730, 830) includes the steps of: (i) evaporating a graphite source (120, 620) in a cathodic arc deposition apparatus (100, 600) to create a carbon plasma (170, 670), (ii) applying a potential difference between the graphite source (120, 620) and a glass or silicon deposition substrate (130, 630, 710, 810) for accelerating the carbon plasma (170, 670) toward the deposition substrate (130, 630, 710, 810), (iii) providing a working gas within the cathodic arc deposition apparatus (100, 600), and (ii) depositing the carbon plasma (170, 670) onto the deposition substrate (130, 630, 710, 810). &lt;IMAGE&gt;</p>
申请公布号 EP0838831(A2) 申请公布日期 1998.04.29
申请号 EP19970116847 申请日期 1997.09.29
申请人 MOTOROLA INC. 发明人 COLL, BERNARD;MENU, ERIC P.;TALIN, ALBERT ALEC
分类号 C23C14/06;C23C14/32;H01J1/304;H01J9/02;H01J29/04;H01J31/12;(IPC1-7):H01J9/02;H01J1/30;H01J37/073;C23C16/26;C23C16/50 主分类号 C23C14/06
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