| 摘要 |
PURPOSE:To form an uniform In metal layer between a wafer holder and a wafer, and fixing the wafer on the wafer holder with excellent uniformity, by pushing up a piston, and introducing molten In metal fluid into a gap between the wafer holder and the wafer to fill the gap. CONSTITUTION:An upper and of a cylinder 9 is provided with an aperture 16, a wafer-center hole 15 to introduce an In metal fluid 2 is drilled at the center of a wafer holder 1, and a heating apparatus 5 to melt an In metal and to maintain its state is installed around a cylinder 9. The flow rate of the In can be adjusted by the lift amount of a piston 10, and the In is supplied between the wafer holder and the wafer so as to be slightly superfluous. The superfluos In metal fluid which flowed out from a gap between the wafer holder 1 and the wafer 3 drops into a groove 4, and prevents a phenomenon that the In metal scatters on the wafer surface during MBE growth. Thus the wafer is fixed on the wafer holder by the effect of the In metal.
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