| 摘要 |
PROBLEM TO BE SOLVED: To enable the detection of anomalies in a simple structure with high reliability by detecting that the output voltage of a integrator or output frequency of a feedback signal generator exceeds a value indicating an anomaly. SOLUTION: An anomaly detecting circuit 28 is connected to the output side of a feedback signal generator 25. The anomaly detecting circuit 28 detects that the frequency of sawtooth wave signals outputted by the feedback signal generator 25 exceeds a specified value and determines as an anomaly. When detecting an anomalous value, the circuit 28 outputs the detection signal of e.g. H logic to an anomalous signal outputting terminal 29. At this time, e.g. the movement of a movable body which carries this optical interference angular velocimeter is halted. If H logic is still outputted to the anomalous signal outputting terminal 29 in a halted state, it is determined that the optical interference angular velocimeter is out of order. The use of a highly sensible sensor is not necessary for this detection, and it is possible to detect anomalies with stable and high reliability. |
