| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of efficiently manufacturing a semiconductor acceleration sensor of such constitution that protective members for suppressing excessive deformation of a thin-walled part is fixed to a peripheral thick-walled part. SOLUTION: A semiconductor acceleration sensor is provided with a detector 10 having at least a thin-walled part deformed in response to imparted acceleration and a peripheral thick-walled part formed around the thin-walled part, and protective members 50 fixed to the peripheral thick-walled part so as to suppress excessive deformation of the thin-walled part. In a method of manufacturing such a semiconductor acceleration sensor, each of the predetermined number of protective members 50 is placed on a placing base 60 in correspondence with a target area where the peripheral thick-walled part of each sensor is formed, and each of the protective members 50 placed on the placing base 60 is almost simultaneously jointed to the corresponding target area of peripheral thick-walled part. |
