| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum vapor deposition device equipped with a controlling means for diffusion of vapor so as to produce a magnetic recording medium and to use such a controlling means for diffusion of vapor that has good thermal conductivity. SOLUTION: The controlling means 15 for diffusion of vapor has a laminar structure from the inside to the outside and consists of an inner wall 15a, intermediate part 15b and outer part 15c. The inner wall 15a consists of Al2 O3 and the intermediate part consists of graphic carbon in such a manner that the coeffts. of thermal expansionα1 ,α2 , of the inner wall 15a and the intermediate part 15b, respectively, satisfyα1 >α2 . The outer part 15c consists of SUS304. Thereby, even when the inner wall 15a and the intermediate part 15b expand by heat during vapor deposition, no space is produced between the inner wall 15a and the intermediate part 15b so that good thermal conduction between layers can be obtd.
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