Circuit arrangement for a capacitive acceleration sensor

摘要

In a circuit arrangement, in particular for a capacitive acceleration sensor having a first capacitor and a second capacitor, the two capacitors have a common middle electrode, which is movably supported in dependence upon an acting acceleration. A position-control circuit applies a voltage to the outer electrodes of the capacitors so as to keep the capacitors equal in size. An a.c. voltage is applied to the middle electrode and the a.c. current adjusting itself at the capacitors is evaluated for purposes of position control.