Method of making integrated suspension magnetic head structures for longitudinal recording

摘要

A plurality of suspension and magnetic head combinations are made on a wafer for longitudinal recording. A horizontal first pole piece and horizontal and vertical components of a second pole piece are formed with a magnetic gap between the first pole piece and the vertical component of the second pole piece. The suspension layers are formed mainly from the insulation layer that separates the horizontal first pole piece and the horizontal component of the second pole piece and an insulation layer that covers and protects the pole pieces. The layers of the combination head are deposited on a wafer in rows and columns. A release layer is deposited on the wafer and then the individual thin film layers of the magnetic head are deposited. The wafer is then divided into rows. The vertical component of the second pole piece is formed on the end of the row in contact with its horizontal component. The substrate is removed by attacking the release layer and then the suspension and magnetic head combinations are cut into separate units.