Surface analysis instrument and method of displaying images using information obtained by surface analysis

摘要

A surface analysis instrument such as an electron probe microanalyzer. The instrument makes surface analyses of different regions on a sample and displays images of the regions according to the obtained information at different positions on the viewing screen of a display unit. The instrument creates a mixed histogram of the regions from the information about the regions. A level assortment is carried out according to the mixed histogram. Information about the level assortment is stored in a memory. Colors are assigned to images of the different regions according to the information about the level assortment. The images are displayed at different positions on the viewing screen.