| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray diffraction device which simply and highly accurately sets scanning range of incident angel of the X-ray. SOLUTION: In an X-ray diffraction device 10, a sample 11 is attached to a swivel table 12, and the swivel table 12 is attached to a rotational shaft 16 of a goniometer being fitted to a convex curve surface 12a. The swivel table 12 can change an incident angleθagainst X-ray 14 from an X-ray source 13 depending on its attaching position to the rotational shaft 16 and can freely set the angel between the surface of the sample 11 and the rotational shaft 16. The incident X-ray 14 is orthogonal (non-parallel) to the rotational shaft 16, and an incident angle of the X-ray 14 against the sample 11 varies from 0 toθdegree during rotation of the sample 11 from 0 to 90 degree. Assuming angular accuracy of the goniometer to beΔθ, the accuracy of the incident angleθof the X-ray 14 isΔθ/90, and therefore scanning range of the incident angle is simply and high accurately set.
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