| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a capacitive pressure sensor of low cost wherein a fixed electrode plate can be accurately attached, number of components is little and assembly is easy. SOLUTION: A capacitive pressure sensor consists of the following; a sensor main body 2 having a pressure introducing port 1, a diaphragm 5 fixed on the sensor main body 2, a movable electrode plate 8 fixed on the center of the diaphragm 5, and a fixed electrode plate 19 which is arranged, facing the movable electrode plate 8 and having a gap, and is fixed on the main body. On the periphery of the fixed electrode plate 19, an electrode part 24 and a caulk part 23 are stretched to a main body side, and caulked and fixed to the sensor main body 2, at the end portion of the caulk part 23.</p> |
