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发明名称
METHOD AND DEVICE FOR PULVERIZING SEMICONDUCTOR MATERIAL
摘要
申请公布号
KR0137336(B1)
申请公布日期
1998.04.25
申请号
KR19940010780
申请日期
1994.05.17
申请人
WACKER-CHEMITRONIC GESELLSCHAFT FUER ELEKTRONIK GRUNDSTOFFE MBH
发明人
FRANZ, KOEPPL;MATTHAEUS, SCHANTZ
分类号
B02C19/06;H01L21/304;(IPC1-7):B02C19/06;B02C19/18
主分类号
B02C19/06
代理机构
代理人
主权项
地址
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