发明名称 EXCIMER LASER DEVICE
摘要 PROBLEM TO BE SOLVED: To suppress the temperature increase in a light-transmitting plate by providing a means for cooling with gas, the light-transmitting plate that transmits stimulated emission light, generated in a container and discharges it outside the container. SOLUTION: A part of light generated in a laser container 1 is confined in a light resonator consisting of a pair of reflection mirrors 3, causes stimulated emission, and laser oscillates. When the repetition frequency of pulse oscillation is inputted from a laser oscillation control means 17 to a motor speed control means 16, a proper motor speed is obtained based on it and a motor 14 is driven, so that a blower 12 rotates and agitates a laser medium gas in the laser container 1. A cooling-gas supply pipe 4 is arranged near a light- transmitting plate 2 and a cooling-gas, such as N2 gas is sprayed onto the outer surface of the light-transmitting plate 2, thus suppressing the temperature increase of the light-transmitting plate 2. The speed of the motor increases as the repetition frequency increases, and the flow of the laser medium gas in the laser container 1 becomes faster, thus improving the cooling effect of the light-transmitting plate 2 due to the laser medium gas and suppressing the temperature increase.
申请公布号 JPH10107361(A) 申请公布日期 1998.04.24
申请号 JP19960256736 申请日期 1996.09.27
申请人 SUMITOMO HEAVY IND LTD 发明人 HAMADA SHIRO
分类号 H01L21/26;H01L21/268;H01S3/041;H01S3/134;(IPC1-7):H01S3/134 主分类号 H01L21/26
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