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发明名称
METHOD FOR INSPECTING PACKAGE SUBSTRATE
摘要
申请公布号
JPH10104301(A)
申请公布日期
1998.04.24
申请号
JP19960258425
申请日期
1996.09.30
申请人
IBIDEN CO LTD
发明人
SHIMIZU KENJI
分类号
G01R31/02;(IPC1-7):G01R31/02
主分类号
G01R31/02
代理机构
代理人
主权项
地址
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