| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable a production line to smoothly make the best use of a space so as to improve a wafer transfer route used for measurements, by a method wherein itemized check stations for the measurements of a wafer and a robot which transfers a wafer from a check station to another are provided. SOLUTION: A measurement system 12, is so constituted as to be equipped with itemized check sections 14 to 20 which take measurements of a wafer subjected to a prescribed manufacturing process, and a robot which transfers a wafer between the check stations 14 to 20. After a wafer is loaded on the system 12 with the robot, the wafer is successively subjected to the corresponding check stations and then unloaded from the system 12. For instance, a particle check station 14, a thickness check station 16, a line width check station 18, and a concentration check 20 are constructed in a system environment. A wafer is transferred to the check stations 14 to 20 from a process equipment 10 and also between the check stations 15 to 20 by a single robot.</p> |
