| 摘要 |
<p>PROBLEM TO BE SOLVED: To perform high-precison positioning without using an expensive length measuring means or increasing mechanical machining precision. SOLUTION: On a base 1, an X stage 11 and a Y stage 12 which move in an X direction and a Y direction are provided and on the reverse surface of aθstage 13 provided on the X stage 11, a positioning scale plate 21 given positioning marks in a grid pattern is fitted. To position the X and Y stages 11 and 12, a detecting device 22 detects the position of a positioning mark and after the position is stored, the X and Y stages 11 and 12 are moved by specific quantities. Then the position of the positioning mark is detected and a position where the positioning mark should be after movement is calculated from the distance between positioning marks on the positioning scale plate 21 and the said movement quantity, thereby moving the X and Y stages 11 and 12 so that the positioning mark is at the position after the movement.</p> |
