| 摘要 |
<p>PROBLEM TO BE SOLVED: To hold a stage at a specific position by preventing the stage from being displaced finely due to vibration, etc., after being positioned. SOLUTION: An X stage 1a is driven by a servomotor 5b in an X direction and a Y stage 1b fitted onto the X stage 1a through a roller guide 13 is driven by a servomotor 5a in a Y direction. The X stage 1a and Y stage 1b are fitted with leaf springs 11a and 11b, and suction mechanism 12a and 12b which suck the leaf springs 11 and 11b are fitted on a base substrate 10 and the X stage 1a. After the X stage 1a and Y stage 1b are positioned by driving the servomotors 5a and 5b, the leaf springs 11a and 11b are sucked by the suction mechanisms 12a and 12b to fix the X stage 1a and Y stage 1b. Consequently, the X stage 1a and Y stage 1b are prevented from being displaced finely.</p> |
