发明名称 BOAT SUPPORTER AND CARRIER
摘要 PROBLEM TO BE SOLVED: To enable a boat to be stably supported while the boat swinging to be avoided regardlless of the unfavorable plane precision of the bottom surface of the boat by forming a spherical shaped boat supporting surface of a supporting member. SOLUTION: A supporting member 29 is made of a columnar base part 29a, a head part 20b formed in expanded diameter on upper end of the base part 29a while a boat supporting surface 29c to be the upper surface of the head part 29b is spherically formed for supporting the flange surface 28 of a boat 12 in point contact. The title boat carrier is provided with a boat supporter 30 three point supporting the flange surface 28 of the boat 12 through the intermediary of the supporting member 29 so that the flange surface 28 of the boat 12 may be three point supported in the point contact not in the surface contact due to the boat supporting surface 29c of the supporting member 29 spherically formed. Through these procedures, the boat 12 can be stably supported regardless of the unfavorable plane precision of the flange surface 28 of the boat 12 thereby enabling the boat swinging to be avoided without fail.
申请公布号 JPH10107019(A) 申请公布日期 1998.04.24
申请号 JP19960277402 申请日期 1996.09.27
申请人 TOKYO ELECTRON LTD 发明人 TAKAHASHI KIICHI
分类号 H01L21/677;H01L21/205;H01L21/22;H01L21/31;H01L21/68;(IPC1-7):H01L21/31 主分类号 H01L21/677
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