| 摘要 |
PROBLEM TO BE SOLVED: To prevent the reduction in precision of measurement due to unnecessary resonance around an axis in the diagonal direction of a diaphragm. SOLUTION: This sensor is provided with a diaphragm 3, a mass part 4 which is elastically supported on a bottom face side thereof, and electrode substrates 6 which oppose through a gap 5 on the diaphragm 3. When three orthogonal axes which measure acceleration components are x-, y-, and zaxes, a square type groove 3a having sides which are parallel with x- and yaxes is formed on a bottom face of a semiconductor wafer arranged in parallel with xy plan, and the diaphragm 3 has a central part 3b, a square type thin wall part 3c, and a frame part 3d. Acceleration components in the direction of three orthogonal axes are detected by detecting electrostatic capacity between each electrode Z, X1, X2, Y1, and Y2 of the electrode substrates 6 and the diaphragm 3. Here, both outer peripherry and inner periphery of the square type thin wall part 3c are rectangles which are long in (x) or (y) direction, and axial lines α1 and α2 and β1 and β2 which connect corresponding corner parts of the outer periphery and the inner periphery are parallel and are deviated by (d). |
