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发明名称
MOVABLE ION SEPARATOR
摘要
申请公布号
JPH10107020(A)
申请公布日期
1998.04.24
申请号
JP19960259254
申请日期
1996.09.30
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
NAKATANI FUMIYOSHI;IMAOKA YASUHIRO
分类号
H01L21/31;H01L21/316;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
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