| 摘要 |
PROBLEM TO BE SOLVED: To provide a generating device of chemical free dry air which supplies chemical free dry air with low cost. SOLUTION: A fan filter unit 2, comprising an outside air introducing fan 3, a chemical filter 4 and an HEPA (high efficiency particulate air) filter 5, and a dry air generating device 6 are assigned in a single chamber 11, and outside air is made to pass through the fan filter unit 2, thereby clean chemical free air free from chemical mist and foreign matters of several micron levels is supplied to the chamber 11. Then the clean chemical free air supplied to the chamber 11 is introduced into the dry air generating device 6, and dehydrated chemical free dry air is, through a piping and a valve 10b, supplied to a use point such as a manufacturing device and a transporting device. |
