PRODUCTION OF POLYMER OPTICAL WAVEGUIDE

摘要

PROBLEM TO BE SOLVED: To produce a waveguide having a uniform cross section of the waveguide and uniform refractive index in the waveguide part with good reproducibility by using a conductive material which is soluble with a solvent and can be applied by spin coating method on a polymer film surface to form an antistatic film. SOLUTION: A conductive material which is soluble with a solvent and can be formed into a film on a polymer film surface by spin coating is used to form an antistatic film. Since an antistatic film is formed by spin coating on a polymer, an antistatic film of const. thickness can be always formed on a polymer by controlling the density of a conductive material in a soln. containing a conductive material such as a conductive polymer or controlling the viscosity of the soln. to a constant value or by keeping a const. rotation for spin coating when the antistatic film is formed. Especially when a fluorinated polyimide is used as the polymer, the solvent to dissolve the conductive material is preferably water or the like which does not dissolve the polymide film.