| 摘要 |
PROBLEM TO BE SOLVED: To improve the yield of manufacture by providing the combination of a shallow part and a passage facilitating the passing of a filler in a part of an external, terminal-side groove to the shallow part of a movable electrode- side groove. SOLUTION: Glass plates 1, 3 and a silicon plate 2 are laminated and assembled with the silicon plate 2 in the center so that the fixed electrodes 6, 7 of the glass plates 1, 3 are opposed to the movable electrode 4 of the silicon plate 2. The output of the lower fixed electrode 7 is taken by an external terminal 13 through a connecting passage 12. The output from the movable electrode 4 is taken by directly forming the external terminal 12 on a part of the silicon plate 2. The external terminal 13 is formed by evaporating aluminum material on the connecting passage 12 and the silicon plate 2. The silicon plate 2 has groove parts 8, 8, and a filler 14 of silicon rubber or the like is filled, extending from a through-hole 15 to the groove parts 8, 9 by mask printing. In order to filling quantity and outflow quantity of the filler 14, shallow groove parts 10, 11 are partially provided on the groove parts 8, 9 of the silicon plate 2. |
