| 摘要 |
PROBLEM TO BE SOLVED: To improve apparent operating speed and to improve the error in slant-line processing by obtaining the occupying rate of the measure for every measure, wherein a figure under process is present, holding the occupying-rate data, wherein a graphic developing curve is generated in a certain constant range, and reading the data. SOLUTION: A photomask 201 is mounted on a XYθ table 202. The pattern formed on the photomask 201 is irradiated by a light source 203. The image of the pattern connected to a photodiode array 205 undergoes photoelectric conversion by the photodiode array 205 and undergoes A/D conversion by a sensor circuit 206. The measured-pattern data outputted from the sensor circuit 206 are sent into a comparing circuit 208 together with the data indicating the position of the photomask 201 on the XYθ table 202 outputted from the position circuit. The pattern design data are stored in a magnetic disk 209 and read out into a data developing circuit 211. The comparing circuit 208 compares the measured pattern data and the design data. |
