| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a large movable amount without making an entire device large by making longitudinal members whose both ends are fixed to a frame curved in projecting/recessed shapes against a positioning object. SOLUTION: This device is provided with a 1st both end supporting bimorph device 6a which is attached to one opened side of a 1st frame 2a which is formed to surround a quadrangular stage (positioning object) 1 and whose central part is fixed to one side of the stage 1 by a pivot 7a, and a 2nd both end supporting bimorph device 6b which is similarly attached to one side of a 2nd frame 2b and whose central part is fixed to one side of the 1st frame by a pivot 7b. To apply voltage to both ends of shims of the devices 6a and 6b makes the devices 6a and 6b curved, and also to fix or press the central parts which can acquire the largest displacement onto a part of the stage 1 can make the stage 1 move by number +μm or more.</p> |
