EVAPOLATING METHOD OF SUBSTITUTED HYDROCARBON FLUORIDE POLYMER LAYER,申请号JP19970191767-传众专利搜索

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发明名称	EVAPOLATING METHOD OF SUBSTITUTED HYDROCARBON FLUORIDE POLYMER LAYER
摘要
申请公布号	JPH10107023(A)	申请公布日期	1998.04.24
申请号	JP19970191767	申请日期	1997.07.02
申请人	NOVELLUS SYST INC	发明人	LOGAN MARK A
分类号	C23C14/12;B05D7/24;C23C16/00;C23C16/511;H01L21/314;H01L21/316;(IPC1-7):H01L21/314	主分类号	C23C14/12
代理机构		代理人
主权项
地址

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