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发明名称
MEV NEUTRAL BEAM ION IMPLANTATION DEVICE
摘要
申请公布号
JPH10106475(A)
申请公布日期
1998.04.24
申请号
JP19970190477
申请日期
1997.07.01
申请人
PURSER KENNETH H
发明人
PURSER KENNETH H
分类号
G21K5/04;C23C14/48;H01J37/317;H01L21/265;H05H3/00;H05H3/02;H05H5/06;(IPC1-7):H01J37/317
主分类号
G21K5/04
代理机构
代理人
主权项
地址
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