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发明名称
FORMATION OF CONNECTION HOLE
摘要
申请公布号
JPH10107142(A)
申请公布日期
1998.04.24
申请号
JP19960259961
申请日期
1996.09.30
申请人
SONY CORP
发明人
NAGAYAMA TETSUJI
分类号
H01L21/28;H01L21/302;H01L21/3065;H01L21/768;(IPC1-7):H01L21/768;H01L21/306
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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