REDUCED OBJECTIVE LENS FOR CATADIOPTRIC MICROLITHOGRAPHY,申请号JP19970261501-传众专利搜索

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发明名称	REDUCED OBJECTIVE LENS FOR CATADIOPTRIC MICROLITHOGRAPHY
摘要
申请公布号	JPH10104513(A)	申请公布日期	1998.04.24
申请号	JP19970261501	申请日期	1997.09.26
申请人	CARL ZEISS:FA	发明人	SCHUSTER KARL HEINZ
分类号	G02B13/18;G02B13/24;G02B17/08;G03F7/20;(IPC1-7):G02B13/24	主分类号	G02B13/18
代理机构		代理人
主权项
地址

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