| 申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
FUJIKI, HIRONAO, TAKASAKI-SHI, GUNMA-KEN, JP;IKENO, MASAYUKI, MAEBASHI-SHI, GUNMA-KEN, JP;ARAKAWA, MASAYA, ANNAKA-SHI, GUNMA-KEN, JP;MICHIMATA, KAORU, TAKASAKI-SHI, GUNMA-KEN, JP;MIYAKOSHI, MASANOBU, ANNAKA-SHI, GUNMA-KEN, JP;OKAMI, TAKEHIDE, ANNAKA-SHI, GUNMA-KEN, JP |
