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发明名称
LAMINATED BODY HAVING CARBON-BASED COATING FILM
摘要
申请公布号
JPH0234786(A)
申请公布日期
1990.02.05
申请号
JP19880182172
申请日期
1988.07.21
申请人
SEMICONDUCTOR ENERGY LAB CO LTD
发明人
HAYASHI SHIGENORI;HAMAYA TOSHIJI
分类号
C23C16/30;C23C16/27
主分类号
C23C16/30
代理机构
代理人
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地址
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