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发明名称
GROWING METHOD OF THIN POLYCRYSTALLINE FILM WITH SOLID SOURCE
摘要
申请公布号
KR0133470(B1)
申请公布日期
1998.04.23
申请号
KR19940010562
申请日期
1994.05.14
申请人
KOREA ELECTRONICS AND TELECOMMUNICATIONS RESEARCH;KOREA TELECOM CORP.
发明人
YUN, SUN-JIN;LEE, SEUNG-CHANG;LEE, JAE-JIN
分类号
H01L21/20;(IPC1-7):H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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