申请人 |
DAINIPPON SCREEN MFG. CO., LTD., KYOTO, JP |
发明人 |
MIYASAKA, EIJI, C/O DAINIPPON SCREEN MFG. CO., HIKONE-SHI, SHIGA-KEN, JP;HANDA, MASAYUKI, C/O DAINIPPON SCREEN MFG.CO., HIKONE-SHI, SHIGA-KEN, JP;TAKEDA, MORIHIRO, C/O DAINIPPON SCREEN MFG.CO., HIKONE-SHI, SHIGA-KEN, JP;TSUJINO, HIROYUKI, C/O DAINIPPON SCREEN MFG.CO., HIKONE-SHI, SHIGA-KEN, JP |