| 申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
FUKUDA, KENICHI, TAKASAKI-SHI, GUNMA-KEN, JP;YAMAGUCHI, KOUICHI, TAKASAKI-SHI, GUNMA-KEN, JP;SATO, SHINICHI, ANNAKA-SHI, GUNMA-KEN, JP;KISHITA, HIROFUMI, ANNAKA-SHI, GUNMA-KEN, JP;ARAI, MASATOSHI, ANNAKA-SHI, GUNMA-KEN, JP;FUJIKI, HIRONAO, TAKASAKI-SHI, GUNMA-KEN, JP |
