发明名称 COMPOUND SEMICONDUCTOR WAFER, COMPOUND SEMICONDUCTOR DEVICE, AND COMPOUND SEMICONDUCTOR SOLAR CELL
摘要 PROBLEM TO BE SOLVED: To provide a low cost and good quality compound semiconductor wafer, compound semiconductor device, and compound semiconductor solar cell without using a thick-film GaAs buffer layer. SOLUTION: In a compound semiconductor wafer, a compound semiconductor device, and a compound semiconductor solar cell in which an epitaxial layer of compound semiconductor is formed on n-type Ge substrate 11, a low-cost and good quality compound semiconductor wafer, compound semiconductor device, and compound semiconductor solar cell can be provided by constituting the first layer of the epitaxial layer as n-type Alx Ga1-x As buffer layer 13 and setting AlAs mixed crystal ratio (x) within the range of 0.1 to 0.4 without using a thick GaAs buffer film, also the same effect can be reproduced in the case that the first layer of the epitaxial layer consists of n-type GaAs layer 12 of 0.02μm or less in thickness and the second layer of n-type Alx Ga1-x As buffer layer 13, and further the AlAs mixed crystal ratio (x) of the second layer is set within the range of 0.1 to 0.4.
申请公布号 JPH10107304(A) 申请公布日期 1998.04.24
申请号 JP19960256368 申请日期 1996.09.27
申请人 HITACHI CABLE LTD 发明人 TAKAHASHI TAKESHI;YAMADA SHIGEKI
分类号 H01L31/04;H01L21/02 主分类号 H01L31/04
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