Process for removing fine particles from articles of fluorine-containing resin

摘要

The invention provides a method for removing the fine particles deposited on an article of fluorine-containing resin, the method comprising conducting at least one of the procedures of: (i) maintaining the article of fluorine-containing resin at a high temperature, (ii) maintaining the article in the atmosphere of fluorine-type gas, and (iii) bringing the article into contact with a polar solvent or an aqueous solution of polar solvent. o