A scanning microscope and a method of operating such a scanning microscope,申请号EP19920307054-传众专利搜索

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发明名称	A scanning microscope and a method of operating such a scanning microscope
摘要
申请公布号	EP0533330(B1)	申请公布日期	1998.04.22
申请号	EP19920307054	申请日期	1992.08.03
申请人	HITACHI, LTD.	发明人	TODOKORO, HIDEO;OTAKA, TADASHI;YAMADA, OSAMU
分类号	H01J37/147;G02B21/00;H01J37/22;H01J37/26;H01J37/28;(IPC1-7):H01J37/28	主分类号	H01J37/147
代理机构		代理人
主权项
地址

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