AUTOMATIC EXHAUSTING APPARATUS OF BUBBLE FOR WAFER CLEANING,申请号KR19940021955U-传众专利搜索

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发明名称	AUTOMATIC EXHAUSTING APPARATUS OF BUBBLE FOR WAFER CLEANING
摘要
申请公布号	KR0116341(Y1)	申请公布日期	1998.04.22
申请号	KR19940021955U	申请日期	1994.08.29
申请人	LE SEMICONDUCTOR CO.,LTD	发明人	KIM, BUM-SOO
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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