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发明名称
WAFER FIXING DEVICE
摘要
申请公布号
KR0116364(Y1)
申请公布日期
1998.04.22
申请号
KR19940016967U
申请日期
1994.07.08
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
KIM, MYUNG-JO;LEE, HYUNG-HO;CHON, JAE-JONG;LEE, KWANG-JOON
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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