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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH10102248(A)
申请公布日期
1998.04.21
申请号
JP19960277039
申请日期
1996.09.27
申请人
SONY CORP
发明人
NADA NAOJI;SHIMODA KAZUTO
分类号
C23C14/35;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
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地址
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