| 摘要 |
<p>PROBLEM TO BE SOLVED: To perform detection with excellent accuracy and high-speed machining without losing the reflection quantity of the sensor beam by adjusting the distance between the axis of a collimator lens and the axis of a machining lens so that the sensor beam passes through the focal point on the incidence side of the machining lens. SOLUTION: The sensor beam 10 is adjusted to pass the focal point F2 on the incidence side of a machining lens 53 by changing the distanceδx2 between the axis C1 of a collimator lens 4 and the axis C2 of the lens 53 to be machined. Because the sensor beam 10 passes through the local point F2 , the optical passage of the sensor 10 leaving from the machining lens 53 and incident on a work 60 is parallel to the optical axis of the laser beam 50, and because the sensor beam 10 is perpendicularly incident on the surface of the work 60, the reflected sensor beam 10 can be passed on the same optical path same as the original path. The reflected sensor beam 10 can be prevented from being deviated from a sensor beam incidence part 3, and the reflection quantity of the sensor beam 10 on the surface of the work 60 can be prevented from being lost.</p> |
