| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a composite metal oxide epitaxial film having a perovskite structure, enabling to obtain the film high in epitaxy in good production efficiency and at a low cost by subjecting a thin film comprising a prescribed mixture of organic group-bound metal compounds and formed on a single crystal substrate to a preliminary calculation process and subsequently to a main calcination process under specific conditions, respectively. SOLUTION: This method for producing a composite metal oxide epitaxial film having a perovskite structure comprises preliminarily calcining a thin film formed on a single crystal (e.g. SrTiO3 single crystal) substrate, comprising an organic group- bound metal compound mixture (e.g. a 1:1 mixture of barium naphthenate with titanium naphthenate) having a metal component composition corresponding to the prescribed perovskite structure and preferably having a thickness of 0.05-5μm at an oxygen partial pressure of 0-10<-2> atm, preferably 10<-3> to 10<-4> atm, at a temperature of 150-400 deg.C, preferably 200-300 deg.C, and subsequently mainly calcining the product at an oxygen partial presser of preferably 0-10<-2> at a temperature of >=500 deg.C, preferably 600-1000 deg.C. Thus, a composite metal oxide (e.g. BaTiO3 ) film preferably having a thickness of 0.05-5μm is obtained.
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