APPARATUS FOR TREATING WATER CONTAINING TETRAALKYLAMMONIUM HYDROXIDE

摘要

PROBLEM TO BE SOLVED: To almost perfectly recover TAAH (tetraalkylammonium hydroxide) efficiently by a simple constitution and operation and to modify impurities containing other org. matter to remove them by adsorption to recover high purity water. SOLUTION: TAAH-containing water 11 is passed through a weak acidic cation exchange column 2 to adsorb TAAH and TAAH is regenerated by an acid to be recovered while treated water of the weak acidic cation exchange column 2 is oxidized by ozone in an ozone oxidizing column 3 to be decomposed to an adsorbable component and ozone treated water is subjected to adsorbing treatment in an activated carbon adsorbing column 5 and further subjected to ion exchange and adsorbing treatment in a strong acidic cation exchange column 6 and a strong basis anion exchange column 7 to recover high purity treated water 18.