SUBSTRATE KNOCK-UP MECHANISM

摘要

PROBLEM TO BE SOLVED: To prevent infiltration of electric discharge by constituting the mechanism in such a manner that only the lifting direction of pins is restrained in connecting parts between the pins and pin lifting means. SOLUTION: The rear surfaces of lower electrodes 3 are provided with plural pin lifting guides 18. The pins 19, pin holes 20 and guides 18 are respectively concentrically disposed. Right end rollers 22 of levers 21 connected to the piston rod 42a of a pin lifting cylinder 42 are fitted into grooves 23a at the bottom ends of the pins 19 so that only the lifting direction of the pins 19 is restrained in the connecting parts to the pins 19. The directions exclusive of the lifting direction of the pins are thereby not restrained and, therefore, the pins 19 and the guides 18 are movable integrally as the electrodes 3 expand thermally. As a result, the spacings formed by the rear surface of the substrate, the pins 19 and the pin holes 20 during the treatment may be minimazed at the lower electrodes 3 heated to a high temp. Even if the lower electrodes 3 expand thermally, the operation of the mechanism is ensured and the infiltration of the electric charge is prevented.