SPUTTERING DEVICE AND FORMATION OF COATING USING THIS DEVICE,申请号JP19960254306-传众专利搜索

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发明名称	SPUTTERING DEVICE AND FORMATION OF COATING USING THIS DEVICE
摘要
申请公布号	JPH10102234(A)	申请公布日期	1998.04.21
申请号	JP19960254306	申请日期	1996.09.26
申请人	CANON INC	发明人	ADACHI TOSHIO
分类号	C23C14/00;H01L21/203;H01L21/285;(IPC1-7):C23C14/00	主分类号	C23C14/00
代理机构		代理人
主权项
地址

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